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DA380_DataSheet

  • 资源大小:660KB
  • 上传时间:2021-11-10
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  • 资源积分:1积分
  • 标      签: DA380

资 源 简 介

The da380 sensor is the low power high performance capacitive three-axis linear accelerometer developed by micro-machined technology. The device is available in a 3x3x0.9 mm land grid array (LGA) and it is guaranteed to operate over an extended temperature range from -40°C to +85°C. The sensor element is fabricated by single crystal silicon with DRIE process and is protected by hermetically sealed silicon cap from the environment.

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