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Chapter 7 Measurement Optics

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  • 标      签: Optics

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GeneralEach laser measurement system’s measurement axis must have an interferometer and a reflector. Machine design consideraTIons determine which type of interferometer is best. The choice of the interferometer for each axis usually determines the reflector for that axis.This chapter describes the Agilent Technologies measurement opTIcs available for Agilent Technologies laser measurement systems. The first part of this chapter presents material that should be useful to the user of any of the interferometers. Following this introductory material, the chapter is divided into subchapters that describe individual interferometer types, including characterisTIcs and specificaTIons.
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